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Mechanical Characterization of MEMS

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Advanced Mechatronics and MEMS Devices II

Part of the book series: Microsystems and Nanosystems ((MICRONANO))

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Abstract

Characterization of microelectromechanical systems, MEMS structures is important for their reliability, specifically for life-sustaining applications. Due to size effect, testing must be done at microscale under the same conditions the components are utilized. Microtesting systems have been developed and used for metallic and nonmetallic MEMS components. Other methods including on-the-chip characterization have been developed and utilized. Details of development or utilization of various micro-characterization techniques are presented in this chapter. There are many issues related to mechanical properties, some of which are briefly described here. Modeling MEMS both computationally and mathematically are depicted along with examples. At the end, future trends in MEMS are discussed.

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Acknowledgement

The author is grateful to Hadi Allameh for his careful reviewing of the manuscript and for providing helpful suggestions.

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  1. Northern Kentucky University, Highland Heights, KY, 41099, USA

    Seyed M. Allameh

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Correspondence to Seyed M. Allameh .

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  1. York University, Toronto, Ontario, Canada

    Dan Zhang

  2. University of Ontario Institute of Technology, Oshawa, Ontario, Canada

    Bin Wei

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Allameh, S.M. (2017). Mechanical Characterization of MEMS. In: Zhang, D., Wei, B. (eds) Advanced Mechatronics and MEMS Devices II. Microsystems and Nanosystems. Springer, Cham. https://doi.org/10.1007/978-3-319-32180-6_7

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  • DOI: https://doi.org/10.1007/978-3-319-32180-6_7

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