Abstract
Hyperspectral imaging (HSI) technique has successfully combined 2D images and spectral analysis for sensing and inspection functions and thus has a wide range of perspective applications. However, traditional HSI system using stand-alone dispersive optics or filters features with complex system structure, large devices and high cost. With development of microfabrication technology and materials, currently, compact microspectrometer integrated with spectral modulating optics and photodetectors have shown great potential in providing fast, reliable, robust and high performance hyperspectral imaging and spectroscopy system, which has drawn great attention in both academic researches and industry. Therefore, current research status of such devices are reviewed in this chapter in terms of novel structure design, fabrication techniques applied.
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Li, L., Huang, C., Zhang, H. (2017). Micro/Nanoscale Optical Devices for Hyperspectral Imaging System. In: Li, T., Liu, Z. (eds) Outlook and Challenges of Nano Devices, Sensors, and MEMS. Springer, Cham. https://doi.org/10.1007/978-3-319-50824-5_16
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DOI: https://doi.org/10.1007/978-3-319-50824-5_16
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