Abstract
Since the advent of microelectronics there has been a continuous development towards eve smaller microstructures until in the last years one reached one limit set by the wavelength of light. Consequently there have been many, and some highly successful, attempts to overcome this barrier by using other types of radiation to make microcircuits even smaller, faster, more complex and at the same time less expensive.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
E. Spiller, R. Feder, I. Topalian, D. Eastman, W. Gudat and D. Sayre, X-ray Microscopy of Biological Objects with Carbon Kα-and with Synchrotron Radiation, Science, Vol. 191, 1976, pp. 1172–1174
E. Spiller, R. Feder, X-ray Lithography, Topics in Applied Physics, Vol. 22 (ed. H.-J. Queisser), Springer Verlag, Berlin-Heidelberg-New-York 1977
R.L. Fleischer, P.B. Price, R.M. Walker, Nuclear Tracks in Solids, University of California Press, Berkeley and Los Angeles, California 1975
T.M. Hall, A. Wagner and L.F. Thompson, Ion Beam Exposure Characteristics of Resists, J. Vac. Sci. Technol., 16(6), Nov./Dec. 1979, pp. 1889–1892
R.L. Fleischer, Nuclear Track Production in Solids Progress in Material Science, about middle 1980
H. Kiesewetter, U. Dauer, K. Mussler, H. Schmid-Schönbein, R. Spohr, Rigidity Measurements in Individual Red Cells Hemorheology at European Pathology Symposion, Nancy, Oct. 1979
H. Heitmann, C. Fritsche, P. Hansen, J.P. Krumme, R. Spohr, K. Witter, Influence of Irradiation with High Energy Ions on Storage Properties of Magneto-optic (Gd,Bi)3 (Fe,Ga)5 O12 Epitaxial Films, J. Magn. Magn. Materials 7, 40–43, 1978
E.V. Benton, R.P. Henke, C.A. Tobias, M.R. Cruty, Lawrence Berkeley Laboratory Report LBL-2887, Berkeley, USA, August 1975
Author information
Authors and Affiliations
Editor information
Rights and permissions
Copyright information
© 1980 Friedr. Vieweg & Sohn Verlagsgesellschaft mbH, Braunschweig
About this chapter
Cite this chapter
Fischer, B.E., Spohr, R. (1980). Microtooling and Microscopy with Heavy Ions Some Examples of Applied Research at GSI. In: Bethge, K., Baumann, H., Jex, H., Rauch, F. (eds) Nuclear Physics Methods in Materials Research. Vieweg+Teubner Verlag. https://doi.org/10.1007/978-3-322-85996-9_18
Download citation
DOI: https://doi.org/10.1007/978-3-322-85996-9_18
Publisher Name: Vieweg+Teubner Verlag
Print ISBN: 978-3-528-08489-9
Online ISBN: 978-3-322-85996-9
eBook Packages: Springer Book Archive