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Sorptionspumpen

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Wutz Handbuch Vakuumtechnik

Zusammenfassung

In diesem Kapitel erfahren Sie etwas über die Pumpweise und Kenndaten von Adsorptions-pumpen, Titansublimationspumpen, Getterpumpen, besonders NEG-Pumpen, und Ionenzerstäuberpumpen. Die physikalischen Grundlagen der Sorption wurden in Kapitel 5 behandelt.

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Authors
  1. Karl Jousten
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  2. Stephan Paetz
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Karl Jousten

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Jousten, K., Paetz, S. (2004). Sorptionspumpen. In: Jousten, K. (eds) Wutz Handbuch Vakuumtechnik. Vieweg+Teubner Verlag, Wiesbaden. https://doi.org/10.1007/978-3-322-96971-2_10

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  • DOI: https://doi.org/10.1007/978-3-322-96971-2_10

  • Publisher Name: Vieweg+Teubner Verlag, Wiesbaden

  • Print ISBN: 978-3-322-96972-9

  • Online ISBN: 978-3-322-96971-2

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