Abstract
The resolution performance of a soft x-ray microscope which uses a zone plate as its focusing element is primarily dependent on the scale and accuracy with which the zone plate can be made. In order to be capable of attaining spatial resolution in the 10 – 100 nm region it is necessary to fabricate zone plates which have finest rings of this scale. Also the placement of the zones must be accurate to a fraction of the finest zone width across the zone plate diameter if aberrations are not to limit resolution.
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© 1988 Springer-Verlag Berlin Heidelberg
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Buckley, C.J., Browne, M.T., Burge, R.E., Charalambous, P., Ogawa, K., Takeyoshi, T. (1988). Zone Plates for Scanning X-Ray Microscopy: Contamination Writing and Efficiency Enhancement. In: Sayre, D., Kirz, J., Howells, M., Rarback, H. (eds) X-Ray Microscopy II. Springer Series in Optical Sciences, vol 56. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-39246-0_16
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DOI: https://doi.org/10.1007/978-3-540-39246-0_16
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