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Integrated and Functional Probes

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Nano-Optics

Part of the book series: Springer Series in Optical Sciences ((SSOS,volume 84))

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Abstract

After the invention of atomic force microscopy (AFM), micromachining tech-nology was soon introduced into the fabrication of AFM probes [1]. Well-defined probes with sharp tips, soft spring, and high resonant frequency were produced in a batch process for commercialization. In addition, using Si mi-cromachining which is compatible with Si integrated circuits, electronic func-tions for sensing and regulating the force acting on the tip have been installed in the micromachined AFM probe [2].

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Authors
  1. T. Ono
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  2. M. Esashi
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  3. H. Yamada
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  4. Y. Sugawara
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  5. J. Takahara
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  6. K. Hane
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Editor information

Editors and Affiliations

  1. Department of Applied Physics, Osaka University, 565-0871, Suita, Osaka, Japan

    Satoshi Kawata

  2. Tokyo Institute of Technology, 4259 Nagatuda, Midori-ku, 226-8502, Yokohama, Japan

    Motoichi Ohtsu

  3. Department of Chemistry and Biochemistry, Graduate School of Engineering, Kyushu University, Japan

    Masahiro Irie

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© 2002 Springer-Verlag Berlin Heidelberg

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Ono, T., Esashi, M., Yamada, H., Sugawara, Y., Takahara, J., Hane, K. (2002). Integrated and Functional Probes. In: Kawata, S., Ohtsu, M., Irie, M. (eds) Nano-Optics. Springer Series in Optical Sciences, vol 84. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-45273-7_5

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  • DOI: https://doi.org/10.1007/978-3-540-45273-7_5

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-07527-8

  • Online ISBN: 978-3-540-45273-7

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