Abstract
Since the early grazing incidence optics based on total reflection, new multilayer optics have renewed hopes of building efficient XUV microscopes. Artificial X and XUV interference mirrors have been made, tested and used in various optical systems for about fifteen years. Normal incidence optics with single spherical mirrors, or double confocal mirrors (Schwarzschild system), have been made for wavelengths longer than the carbon K edge (45 A). Even for non-normal incidence multilayers have advantages compared to total-reflection optics. Grazing and normal incidence X and XUV optics are reviewed according to recent improvements in figure errors and superpolished mirrors.
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© 1992 Springer-Verlag Berlin Heidelberg
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Dhez, P. (1992). X and XUV Microscopes Based on Mirror Optics. In: Michette, A.G., Morrison, G.R., Buckley, C.J. (eds) X-Ray Microscopy III. Springer Series in Optical Sciences, vol 67. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-46887-5_23
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DOI: https://doi.org/10.1007/978-3-540-46887-5_23
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