Abstract
In the first half of this chapter, a novel fabrication method called nanophotonic polishing is reviewed. This method is a probeless and maskless optical processing technique that employs a nonadiabatic photochemical reaction . Nanophotonics has already brought about innovation in fabrication methods, such as with photochemical vapor deposition [1] and photolithography [2]. Conventional photochemical vapor deposition is a way to deposit materials on a substrate using a photochemical reaction with ultraviolet light that predissociates metal-organic molecules by irradiating gaseous molecules or molecules adsorbed on the substrate.
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Acknowledgments
The work in Sect. 4.2 is supported by New Energy and Industrial Technology Development Organization (NEDO) Special Courses: A comprehensive activity for personnel training and industry-academia collaboration based on NEDO projects.
The works in Sect. 4.3 are supported in partial by the Global Center of Excellence (G-COE) "Secure-Life Electronics" sponsored by the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan.
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Nomura, W., Yatsui, T., Ohtsu, M. (2010). Nonadiabatic Near-Field Optical Polishing and Energy Transfers in Spherical Quantum Dots. In: Ohtsu, M. (eds) Progress in Nano-Electro-Optics VII. Springer Series in Optical Sciences, vol 155. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-03951-5_4
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