Abstract
Semiconductor pressure sensors have been applied widely in various fields, for example, automobile, medical or industrial use. The requests for small size, low cost, highly accurate and reliable pressure sensors have been increased
The pressure sensor composed of a silicon diaphragm with piezoresistors, a CMOS amplifier and 48 bit EPROM for digital trimming is combining all mentioned characteristics in the same chip. A high accuracy solution by calibration after assembled can be realised. This new EPROM pressure sensor is suitable for a wide range of applications. Especially in the automotive field where demand of sensors is increasing. For example to achieve low emissions and cleaner exhaust gas to comply with environmental regulations, or sensors for the engine control unit and brake systems.
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© 2001 Springer-Verlag Berlin Heidelberg
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Schmidt, R., Sakai, T., Ueyanagi, K. (2001). Pressure Sensors for Automotive Applications — with New One Chip EPROM Technology. In: Krueger, S., Gessner, W. (eds) Advanced Microsystems for Automotive Applications 2001. VDI-Buch. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-18253-2_12
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DOI: https://doi.org/10.1007/978-3-642-18253-2_12
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-62124-6
Online ISBN: 978-3-642-18253-2
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