Abstract
Low loss and high quality factor (Q) for filter elements are absolute requirements in the applications in the great development in wireless data communication. The filters based on LC, ceramic resonators and transmission line resonators are difficult to meet the performance requirements when the operation frequency increases to GHz range. Film bulk acoustic wave resonator (FBAR) is has high performances and the compatibility to IC. In addition, FBAR is a very promising method in view of mass loading sensors. In this chapter, an introduction to piezoelectric bulk acoustic resonators is given. The motivation, basic principle, configure, applications and its developments were reviewed. The performance for filter and sensing with other resonators were compared. The overview of each cheaper in this book is presented.
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© 2013 Shanghai Jiao Tong University Press, Shanghai and Springer-Verlag Berlin Heidelberg
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Zhang, Y., Chen, D. (2013). Introduction. In: Multilayer Integrated Film Bulk Acoustic Resonators. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-31776-7_1
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DOI: https://doi.org/10.1007/978-3-642-31776-7_1
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