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Reaction Dynamics of Molecular Hydrogen on Silicon Surfaces: Importance of Lattice Degrees of Freedom

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Dynamics of Gas-Surface Interactions

Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 50))

Abstract

Hydrogen dissociation on silicon surfaces is strongly activated both by kinetic energy of the H2 molecules as well as by surface temperature. The latter effect is correlated to the covalent nature of the Si–Si and Si–H bonds with its strong localization of electronic density and a concomitant large lattice distortion in the transition state of the reaction. As a consequence, dynamical lattice distortions can create pathways with increased reactivity, similar to static lattice distortions at steps or defects. The resulting broad distribution of adsorption barriers at elevated surface temperature converts into a low mean translational energy in desorption.

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References

  1. A. Winkler, K.D. Rendulic, Int. Rev. Phys. Chem. 11, 101 (1992)

    Article  Google Scholar 

  2. H.A. Michelsen, C.T. Rettner, D.J. Auerbach, in Surface Reactions, ed. by R.J. Madix (Springer, Berlin, 1994), pp. 185–237

    Chapter  Google Scholar 

  3. A. Hodgson, Prog. Surf. Sci. 63, 1 (2000)

    Article  ADS  Google Scholar 

  4. H. Zacharias, Int. J. Mod. Phys. B 4, 45 (1990)

    Article  ADS  Google Scholar 

  5. G.O. Sitz, Rep. Prog. Phys. 65, 1165 (2002)

    Article  ADS  Google Scholar 

  6. D. Farías, R. Miranda, Prog. Surf. Sci. 86, 222 (2011)

    Article  ADS  Google Scholar 

  7. G.R. Darling, S. Holloway, Rep. Prog. Phys. 58, 1595 (1995)

    Article  ADS  Google Scholar 

  8. A. Gross, Surf. Sci. Rep. 32, 291 (1998)

    Article  ADS  Google Scholar 

  9. G.J. Kroes, Prog. Surf. Sci. 60, 1 (1999)

    Article  ADS  Google Scholar 

  10. A.M. Wodtke, J.C. Tully, D.J. Auerbach, Int. Rev. Phys. Chem. 23, 513 (2004)

    Article  Google Scholar 

  11. G.J. Kroes, Science 321, 794 (2008)

    Article  ADS  Google Scholar 

  12. J.M. Jasinski, S.M. Gates, Acc. Chem. Res. 24, 9 (1991)

    Article  Google Scholar 

  13. J.J. Boland, Adv. Phys. 42, 129 (1993)

    Article  ADS  Google Scholar 

  14. H.N. Waltenburg, J.T. Yates, Chem. Rev. 95, 1589 (1995)

    Article  Google Scholar 

  15. K. Oura, V.G. Lifshits, A.A. Saranin, A.V. Zotov, M. Katayama, Surf. Sci. Rep. 35, 1 (1999)

    Article  Google Scholar 

  16. A.J. Mayne, D. Riedel, G. Comtet, G. Dujardin, Prog. Surf. Sci. 81, 1 (2006)

    Article  ADS  Google Scholar 

  17. K.W. Kolasinski, Int. J. Mod. Phys. B 9, 2753 (1995)

    Article  ADS  Google Scholar 

  18. D.J. Doren, Adv. Chem. Phys. 95, 1 (1996)

    Article  Google Scholar 

  19. U. Höfer, Appl. Phys. A 63, 533 (1996)

    Article  ADS  Google Scholar 

  20. M.R. Radeke, E.A. Carter, Annu. Rev. Phys. Chem. 48, 243 (1997)

    Article  ADS  Google Scholar 

  21. W. Brenig, M.F. Hilf, J. Phys. Condens. Matter 13, R61 (2001)

    Article  ADS  Google Scholar 

  22. M. Dürr, U. Höfer, Surf. Sci. Rep. 61, 465 (2006)

    Article  ADS  Google Scholar 

  23. A. Namiki, Prog. Surf. Sci. 81, 337 (2006)

    Article  ADS  Google Scholar 

  24. W. Brenig, E. Pehlke, Prog. Surf. Sci. 83, 263 (2008)

    Article  ADS  Google Scholar 

  25. J.T. Law, J. Chem. Phys. 30, 1568 (1959)

    Article  ADS  Google Scholar 

  26. W. Brenig, A. Gross, R. Russ, Z. Phys. B 96, 231 (1994)

    Google Scholar 

  27. P. Bratu, K.L. Kompa, U. Höfer, Chem. Phys. Lett. 251, 1 (1996)

    Article  ADS  Google Scholar 

  28. P. Bratu, W. Brenig, A. Groß, M. Hartmann, U. Höfer, P. Kratzer, R. Russ, Phys. Rev. B 54, 5978 (1996)

    Article  ADS  Google Scholar 

  29. M. Dürr, U. Höfer, J. Chem. Phys. 121, 8058 (2004)

    Article  ADS  Google Scholar 

  30. P. Bratu, U. Höfer, Phys. Rev. Lett. 74, 1625 (1995)

    Article  ADS  Google Scholar 

  31. M. Dürr, M.B. Raschke, U. Höfer, J. Chem. Phys. 111, 10411 (1999)

    Article  Google Scholar 

  32. M.B. Raschke, U. Höfer, Appl. Phys. B 68, 649 (1999)

    Article  ADS  Google Scholar 

  33. M. Dürr, M.B. Raschke, E. Pehlke, U. Höfer, Phys. Rev. Lett. 86, 123 (2001)

    Article  ADS  Google Scholar 

  34. H.A. Michelsen, C.T. Rettner, D.J. Auerbach, J. Chem. Phys. 98, 8294 (1993)

    Article  ADS  Google Scholar 

  35. M.J. Murphy, A. Hodgson, J. Chem. Phys. 108, 4199 (1998)

    Article  ADS  Google Scholar 

  36. J.A. Kubby, J.J. Boland, Surf. Sci. Rep. 26, 61 (1996)

    Article  ADS  Google Scholar 

  37. P. Kratzer, E. Pehlke, M. Scheffler, M.B. Raschke, U. Höfer, Phys. Rev. Lett. 81, 5596 (1998)

    Article  ADS  Google Scholar 

  38. M. Balooch, M.J. Cardillo, D.R. Miller, R.E. Stickney, Surf. Sci. 46, 358 (1974)

    Article  ADS  Google Scholar 

  39. K.D. Rendulic, A. Winkler, Surf. Sci. 300, 261 (1994)

    Article  ADS  Google Scholar 

  40. G. Anger, A. Winkler, K.D. Rendulic, Surf. Sci. 220, 1 (1989)

    Article  ADS  Google Scholar 

  41. B.E. Hayden, C.L.A. Lamont, Phys. Rev. Lett. 63, 1823 (1989)

    Article  ADS  Google Scholar 

  42. B.E. Hayden, C.L.A. Lamont, Surf. Sci. 243, 31 (1991)

    Article  ADS  Google Scholar 

  43. C.T. Rettner, D.J. Auerbach, H.A. Michelsen, Phys. Rev. Lett. 68, 1164 (1992)

    Article  ADS  Google Scholar 

  44. S.J. Gulding, A.M. Wodtke, H. Hou, C.T. Rettner, H.A. Michelsen, D.J. Auerbach, J. Chem. Phys. 105, 9702 (1996)

    Article  ADS  Google Scholar 

  45. H. Hou, S.J. Gulding, C.T. Rettner, A.M. Wodtke, D.J. Auerbach, Science 277, 80 (1997)

    Article  Google Scholar 

  46. H.A. Michelsen, C.T. Rettner, D.J. Auerbach, Surf. Sci. 272, 65 (1992)

    Article  ADS  Google Scholar 

  47. M. Dürr, Z. Hu, A. Biedermann, U. Höfer, T.F. Heinz, Phys. Rev. B 63, 121315 (2001)

    Article  ADS  Google Scholar 

  48. A. Biedermann, E. Knoesel, Z. Hu, T.F. Heinz, Phys. Rev. Lett. 83, 1810 (1999)

    Article  ADS  Google Scholar 

  49. E. Pehlke, Phys. Rev. B 62, 12932 (2000)

    Article  ADS  Google Scholar 

  50. M. Dürr, Z. Hu, A. Biedermann, U. Höfer, T.F. Heinz, Phys. Rev. Lett. 88, 046104 (2002)

    Article  ADS  Google Scholar 

  51. A. Gross, J. Chem. Phys. 102, 5045 (1995)

    Article  ADS  Google Scholar 

  52. M.B. Raschke, Dissertation, Technische Universität München (1999)

    Google Scholar 

  53. M. Dürr, Dissertation, Technische Universität München (2000)

    Google Scholar 

  54. B.S. Jursic, Chem. Phys. Lett. 261, 13 (1996)

    Article  ADS  Google Scholar 

  55. C. Filippi, S.B. Healy, P. Kratzer, E. Pehlke, M. Scheffler, Phys. Rev. Lett. 89, 166102 (2002)

    Article  ADS  Google Scholar 

  56. K.W. Kolasinski, W. Nessler, A. Demeijere, E. Hasselbrink, Phys. Rev. Lett. 72, 1356 (1994)

    Article  ADS  Google Scholar 

  57. T. Sagara, T. Kuga, K. Tanaka, T. Shibataka, T. Fujimoto, A. Namiki, Phys. Rev. Lett. 89, 086101 (2002)

    Article  ADS  Google Scholar 

  58. T. Matsuno, T. Niida, H. Tsurumaki, A. Namiki, J. Chem. Phys. 122, 024702 (2005)

    Article  ADS  Google Scholar 

  59. A.C. Luntz, P. Kratzer, J. Chem. Phys. 104, 3075 (1996)

    Article  ADS  Google Scholar 

  60. M.R. Radeke, E.A. Carter, Surf. Sci. 355, L289 (1996)

    Article  ADS  Google Scholar 

  61. M. Dürr, A. Biedermann, Z. Hu, U. Höfer, T.F. Heinz, Science 296, 1838 (2002)

    Article  ADS  Google Scholar 

  62. M.F. Hilf, W. Brenig, J. Chem. Phys. 112, 3113 (2000)

    Article  ADS  Google Scholar 

  63. K.W. Kolasinski, S.F. Shane, R.N. Zare, J. Chem. Phys. 96, 3995 (1992)

    Article  ADS  Google Scholar 

  64. P. Kratzer, R. Russ, W. Brenig, Surf. Sci. 345, 125 (1996)

    Article  ADS  Google Scholar 

  65. P. Kratzer, B. Hammer, J.K. Norskov, Chem. Phys. Lett. 229, 645 (1994)

    Article  ADS  Google Scholar 

  66. P. Kratzer, B. Hammer, J.K. Norskov, Phys. Rev. B 51, 13432 (1995)

    Article  ADS  Google Scholar 

  67. K.W. Kolasinski, S.F. Shane, R.N. Zare, J. Chem. Phys. 95, 5482 (1991)

    Article  ADS  Google Scholar 

  68. H.A. Michelsen, D.J. Auerbach, J. Chem. Phys. 94, 7502 (1991)

    Article  ADS  Google Scholar 

  69. D.J. Auerbach, C.T. Rettner, H.A. Michelsen, Surf. Sci. 283, 1 (1993)

    Article  ADS  Google Scholar 

  70. G.D. Kubiak, G.O. Sitz, R.N. Zare, J. Chem. Phys. 83, 2538 (1985)

    Article  ADS  Google Scholar 

  71. E. Pehlke, J. Tersoff, Phys. Rev. Lett. 67, 1290 (1991)

    Article  ADS  Google Scholar 

  72. M. Dürr, U. Höfer, Phys. Rev. Lett. 88, 076107 (2002)

    Article  ADS  Google Scholar 

  73. Y.J. Chabal, K. Raghavachari, Phys. Rev. Lett. 53, 282 (1984)

    Article  ADS  Google Scholar 

  74. Y.S. Park, J.S. Bang, J. Lee, Surf. Sci. 283, 209 (1993)

    Article  ADS  Google Scholar 

  75. T. Shibataka, T. Matsuno, H. Tsurumaki, A. Namiki, Phys. Rev. B 68, 113307 (2003)

    Article  ADS  Google Scholar 

  76. G. Mette, C.H. Schwalb, M. Dürr, U. Höfer, Chem. Phys. Lett. 483, 209 (2009)

    Article  ADS  Google Scholar 

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Correspondence to Michael Dürr .

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Dürr, M., Höfer, U. (2013). Reaction Dynamics of Molecular Hydrogen on Silicon Surfaces: Importance of Lattice Degrees of Freedom. In: Díez Muiño, R., Busnengo, H. (eds) Dynamics of Gas-Surface Interactions. Springer Series in Surface Sciences, vol 50. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-32955-5_10

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