Abstract
A multitude of analytical techniques which incorporate an electron optical column in the probe-forming and/or image-forming system have been developed during the last twenty years. These include the surface-sensitive technique of Auger electron spectroscopy, thermionic emission microscopy and photoelectron microscopy; the analysis of “bulk” specimens by electron probe microanalysis and the analysis of “thin” specimens by X-ray or electron spectrometry. Auger electron spectroscopy has been developed into a powerful tool for the chemical analysis of surface layers (Chang, 1973). It is particularly sensitive to the light elements C, H and O and has a spatial resolution for analysis of a few microns. Thermionic emission microscopy and photoelectron microscopy are useful techniques for studying phase distributions at a resolution in the micron range (Wegmann, 1972; Kinsman and Aaronson, 1972) but they cannot be classified as techniques of quantitative chemical analysis. Electron probe microanalysis is established as a standard tool for the analysis of bulk specimens, and it has made a very important contribution to mineralogy. The spatial resolution for analysis is a few microns with limits of detection, typically, 10–50 ppm. Procedures for carrying out quantitative analyses are well established and have been discussed by numerous authors (see, for example, Andersen, 1973; Heinrich, 1967).
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References
Ahmed, H.: The use of lanthanum hexaboride and composite boride cathodes in electron optical instruments. Proc. 25th Anniversary Meeting of EMAG, Inst. Physics, Cambridge, p. 30–32 (1971).
Andersen, CA. (ed.): Microprobe analysis. London: John Wiley and Sons 1973.
Atkins, F.B.: Pyroxenes of the Bushveld intrusion, South Africa. J. Petrol. 10, 222–249 (1969).
Bishop, H.E.: Recent instrumental developments in microanalysis. In: Advances in analysis of microstructural features by electron-beam techniques. Metals Society, London, p. 2–19(1974).
Chang, C.C.: Auger electron spectroscopy. Surface Sci. 25, 80–119 (1973).
Cliff, G., Lorimer, G.W.: The quantitative analysis of thin specimens. J. Microscopy. 103, 203–207 (1975).
Cooke, C.J., Duncumb, P.: Performance analysis of a combined electron microscope and electron probe microanalyser “EMMA”. Proc. 5th Int. Conf. on X-ray Optics and Microanalysis. Tübingen, p. 245–247 (1968).
Cooke, C.J., Openshaw, I.K.: A high resolution electron microscope with efficient X-ray microanalysis facilities. Proc. 4th Nat. Conf. on Electron Probe Microanalysis, Pasadena, p. 64–66(1969).
Cooke, C.J., Openshaw, I.K.: Combined high resolution electron microscope and X-ray microanalysis. Proc. 28th annual EMSA Meeting, Baton Rouge, p. 552–553 (1970).
Cosslett, V.E., Thomas, R.N.: Multiple scattering of 5–30 keV electrons in evaporated metal films I: Total transmission and angular distribution. Brit. J. Appl. Phys. 15, 883–907 (1964a).
Cosslett, V.E., Thomas, R.N.: Multiple scattering of 5–30 keV electrons in evaporated metal films II: Range-energy relations. Brit. J. Appl. Phys. 15, 1283–1300 (1964b).
Crew, A.V.: Imaging of single atoms in scanning microscopy. Proc. 5th Europ. Congress on Electron Microscopy, Manchester, p. 640–642 (1972).
Crew, A.V., Wall, J., Langmore, T.: Visibility of single atoms. Science 168, 1338–1340 (1970).
Cundy, S.L., Metherell, A.J.F., Whelan, M.J.: An energy-analysing electron microscope. J. Sci. Instr. 43, 712–715(1965).
Duncumb, P.: An electron-optical bench for microscopy, diffraction and X-ray microanalysis. Proc. 5th Int. Congress on Electron Microscopy. New York: Academic Press P.KK4 (1962).
Edington, J.W., Hibbert, G.: High-resolution microanalysis of aluminium solid solution alloys using combined electron microscopy and energy analysis. J. Microsc. 99, 125–146 (1973).
Hall, T.A.: The microprobe assay of chemical elements. In: Physical techniques in biological research, 2nd edition, vol. 1A (ed. G. Oster), p. 157–275. New York: Academic Press 1971.
Heinrich, K.F.J. (ed.): Quantitative electron probe microanalysis. Nat. Bur. St. Spec. Publ. 289 (1967).
Hess, H.H.: Stillwater igneous complex, Montana. Geol. Soc. Am. Mem. 80 (1960).
Jacobs, M.H.: Energy and wavelength dispersive X-ray microanalysis. Advances in analysis of microstructural features by electron beam techniques. Metals Society, London, p. 80–118 (1974).
Joy, D.C.: The choice of electron sources for analysis. Advances in analysis of microstructural features by electron beam techniques. Metals Society, London, p. 20, 40 (1974).
Kinsman, K.R., Aaronson, H.J.: Application of thermionic emission electron microscopy to the study of phase transformations. In: Electron microscopy and structure of materials (ed. G. Thomas), p. 259–285. Berkeley: University of California Press 1972.
Lorimer, G.W., Champness, P.E.: Combined electron microscopy and analysis of an ortho-pyroxene. Am. Mineralogist 58, 243–248 (1973).
Lorimer, G.W., Nasir, M.J., Nicholson, R.B., Nuttall, K., Ward, D.E., Webb, J.R.: The use of an analytical electron microscope (EMMA-4) to investigate solute concentrations in thin metal foils. In: Electron microscopy and structure of materials (ed. G. Thomas), p. 222–234. Berkeley: University of California Press 1972.
Lorimer, G.W., Razik, N.A., Cliff, G.: The use of the analytical electron microscope EMMA-4 to study the solute distribution in thin foils: some applications to metals and minerals. J. Microsc. 99, 153–164 (1973).
Shimizu, R., Ikuta, T., Murata, K.: The Monte Carlo technique as applied to the fundamentals of EPMA and SEM. J. Appl. Phys. 43, 4233–4249 (1972).
Silcox, J., Vincent, R.: Energy analysis and energy selection in electron microscopy and electron diffraction. In: Electron microscopy and structure of materials (ed. G. Thomas), p. 188–220. Berkeley: University of California Press 1972.
Wegmann, L.: Analytical Methods in Photoemission Electron Microscopy. In: Electron microscopy and structure of materials (ed. G. Thomas), p. 246–258. Berkeley: University of California Press 1972.
Woolf, R.J., Joy, D.C: Quantitative assessment of pointed filaments as bright electron sources. Proc. 25th Anniversary Meeting of EMAG, Inst. Physics, Cambridge, p. 34–37 (1971).
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Lorimer, G.W., Cliff, G. (1976). Analytical Electron Microscopy of Minerals. In: Wenk, HR. (eds) Electron Microscopy in Mineralogy. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-66196-9_38
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DOI: https://doi.org/10.1007/978-3-642-66196-9_38
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