Abstract
The as-grown YBaCuO films deposited by the off-axis sputtering method using a temple-bell type substrate holder showed a good crystalline quality with a minimum yield value xmin of 0. 9MeV He ions 3.8%. The post-annealing degraded the crystalline quality to increase xmin up to 11.8%, though it improved both the Tc and Jc. It was supposed that the degradation was caused by the re-arrangement of oxygen atoms.
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References
X. X. Xi, G. Linker, O. Meyer and J. Geerk, J. Less-Common Met. 151, 295, 1989.
H. Kajikawa, Y. Fukumoto, K. Shibutani, S. Hayashi, R. Ogawa and Y. Kawate, to be published in Proceedings for ISS’90, 1990.
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© 1992 Springer-Verlag Berlin, Heidelberg
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Kajikawa, H., Fukumoto, Y., Shibutani, K., Hayashi, S., Ishibashi, K., Inoue, K. (1992). Characterization of YBaCuO Films Deposited by the Sputtering Method Using a Temple-Bell-Type Substrate Holder. In: Iye, Y., Yasuoka, H. (eds) The Physics and Chemistry of Oxide Superconductors. Springer Proceedings in Physics, vol 60. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-77154-5_15
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DOI: https://doi.org/10.1007/978-3-642-77154-5_15
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