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Ion Beam Mixing in Metals

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Surface Science
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Abstract

Ion mixing of impurity markers in silver and of isotopic silver bilayers is discussed. The efficiency of mixing is shown to depend on the ion species and energy as well as the substrate temperature and the impurity species. The magnitude of ion mixing broadly agrees with the Koponen and Hautala thermal spike theory of ion mixing.

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References

  1. T. Diaz de la Rubia, R.S Averback, H. Hsieh and R. Benedek, J.Mater.Res. 4 (1989) 579

    Article  Google Scholar 

  2. B.M. Paine, J.Appl.Phys. 53 (1982) 6828

    Article  CAS  Google Scholar 

  3. B.V. King, S.G. Puranik, M.A. Sobhan, R.J. MacDonald, Nucl.Instr.Meth. B39 (1989) 153

    CAS  Google Scholar 

  4. B.V. King and I.S.T. Tsong, J.Vac.Sci.Technol. A2 (1984) 1443

    Google Scholar 

  5. B.V. King, R.P Webb, V.K.M. Sharma and J.A. Kilner, SIMS VIII, eds A. Benninghoven etal (John Wiley, Chichester, 1992) 363

    Google Scholar 

  6. B.V. King, M. Petravie, R.G. Elliman and R.J. Chater, SIMS IX, in press

    Google Scholar 

  7. B.V. King, C. Jeynes, R.P. Webb, J.A. Kilner, Nucl.Instr.Meth. B80/81 (1993) 163.

    Google Scholar 

  8. M. Petravie, R.G. Elliman and J.S. Williams, SIMS VIII, eds A. Benninghoven, K.T.F. Janssen, J. Tumpner and H.W. Werner (John Wiley, Chichester, 1992) 367

    Google Scholar 

  9. P. C. Zalm and C.J. Vriezema, Nucl.Instr.Meth.B67 (1992) 495.

    CAS  Google Scholar 

  10. J.P. Biersack and L.G. Haggmark, Nucl.Instr.Meth. 174 (1980) 257

    Article  CAS  Google Scholar 

  11. Sputtering by Particle Bombardment II, ed R. Behrisch (Springer-Verlag Berlin 1983)

    Google Scholar 

  12. E. Ma, S.-J. Kim, M.-A. Nicolet and R.S. Averback, J.Appl. Phys. 63 (1988) 2449

    Article  CAS  Google Scholar 

  13. I. Koponen and M. Hautala, Nucl.Instr.Meth. B69 (1992) 182

    CAS  Google Scholar 

  14. T. Diaz de la Rubia and W.J. Phythian, J.Nucl.Mat. 191–4 (1992) 108

    Google Scholar 

  15. S. -J. Kim, M. -A. Nicolet, R. S. Averback, Nucl.Instr.Meth. B19/20 (1987) 662.

    Google Scholar 

  16. A.K. Nissen, F.R. de Boer, R. Boom, P.F. de Chatel and W.C.M. Mattens, Calphad 7 (1983) 51.

    Article  Google Scholar 

  17. A. Müller, V. Naundorf and M.P. Macht, J.Appl. Phys. 64 9 (1988) 3445

    Article  Google Scholar 

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© 1996 Springer-Verlag Berlin Heidelberg

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King, B.V., Sobhan, M.A., Petravic, M. (1996). Ion Beam Mixing in Metals. In: MacDonald, R.J., Taglauer, E.C., Wandelt, K.R. (eds) Surface Science. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-80281-2_11

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  • DOI: https://doi.org/10.1007/978-3-642-80281-2_11

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-80283-6

  • Online ISBN: 978-3-642-80281-2

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