Abstract
The possibility of submicron scanning ion microscopy was demonstrated long ago [1, 2], Its potential use for SIMS applications has been the subject of theoretical and experimental investigations in a number of laboratories [3–12]. With the growing importance of submicron devices this instrumentation will surely have a future.
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© 1984 Springer-Verlag Berlin Heidelberg
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Liebl, H. (1984). Ion Gun Systems for Submicron SIMS. In: Benninghoven, A., Okano, J., Shimizu, R., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS IV. Springer Series in Chemical Physics, vol 36. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82256-8_33
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DOI: https://doi.org/10.1007/978-3-642-82256-8_33
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