Skip to main content
SpringerLink
Log in

Hydrogen Profiling in Titanium

  • Conference paper
Secondary Ion Mass Spectrometry SIMS V

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 44))

  • 290 Accesses

Abstract

Measurements of the hydrogen concentration in metals using secondary ion mass spectrometry (SIMS) can be made by monitoring either atomic hydrogen ion emission or the ratio of metal-hydride to metal ion emission. BENNINGHOVEN and co-workers [1,2] have shown that the latter approach is less susceptible to matrix effects and more quantitative. For titanium, overlap between metal-hydride and metal ion emission occurs in typical SIMS measurements because the five naturally occurring Ti isotopes have adjacent masses. This complication has led to the development of several methods to extract the TiH+/Ti+ ratio from SIMS data [3]. This paper will describe the various methods and evaluate them in terms of accuracy and data collection efficiency.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 84.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. A. Benninghoven, P. Beckmann, D. Greifendorf, K. -H. Müller, and M. Schemmer: Surf. Sci. 107 148 (1981)

    Google Scholar 

  2. M. Schemmer, P. Beckmann, D. Greifendorf, and A. Benninghoven: In Secondary Ion Mass Spectrometry SIMS-III, ed. by A. Benninghoven, J. Giber, J. László, M. Riedel, and H. W. Werner, Springer Series in Chemical Physics, Vol. 19, ( Springer, Berlin, Heidelberg, New York 1982 ) p. 405

    Google Scholar 

  3. R. Bastasz J. Vac. Sci. Technol. A 3, 1363 (1985)

    ADS  Google Scholar 

  4. J. P. Biersack and L. G. Haggmark: Nucl. Instrum. Meth. 174 257 (1980)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Sandia National Laboratories, Livermore, CA, 94550, USA

    R. Bastasz

Authors
  1. R. Bastasz
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Physikalisches Institut, Universität Münster, Domagkstraße 75, D-4400, Münster, Fed. Rep. of Germany

    Alfred Benninghoven

  2. Chemistry Division, Naval Research Laboratory, 20375, Washington, DC, USA

    Richard J. Colton

  3. Center for Analytical Chemistry, National Bureau of Standards, 20899, Gaithersburg, MD, USA

    David S. Simons

  4. Philips Research Laboratories, NL-Eindhoven, The Netherlands

    Helmut W. Werner

Rights and permissions

Reprints and permissions

Copyright information

© 1986 Springer-Verlag Berlin Heidelberg

About this paper

Cite this paper

Bastasz, R. (1986). Hydrogen Profiling in Titanium. In: Benninghoven, A., Colton, R.J., Simons, D.S., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS V. Springer Series in Chemical Physics, vol 44. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82724-2_106

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-82724-2_106

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82726-6

  • Online ISBN: 978-3-642-82724-2

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation