Skip to main content
SpringerLink
Log in

Insulating Silicon Nitride Films

  • Chapter
Si Silicon

Part of the book series: Si. Silicium. Silicon (System-Nr. 15) ((2074,volume S-i / B / 1-5 / 5 / c))

  • 314 Accesses

Abstract

In insulating silicon nitride films, the dielectrical properties of silicon nitride are of primary importance, whereas in encapsulating and passivating silicon nitride films, the chemical barrier properties are utilized. Of course, the same film can serve more than one application. Some work on insulating silicon nitride films that is not directly related to a particular device is presented in this chapter.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 1,459.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Chang, K. M. (Diss. Ohio State Univ. 1985, pp. 1/299 from

    Google Scholar 

  2. Chang, K. M. Diss. Abstr. Intern. B 46 [1986] 4344; C.A. 105 [1986] No. 106763).

    Google Scholar 

  3. Goellnitz, H.; Jahn, A.; Kurt, J. (Wiss. Z. T.H. Ilmenau 19 No. 1 [1973] 65/79; C.A. 81 [1974] No. 143151).

    Google Scholar 

  4. Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 58–106846 [1981/83] from C.A. 99 [1983] No. 168026).

    Google Scholar 

  5. Naito, K. (Japan. Kokai Tokkyo Koho 63–96927 [1988] from C.A. 109 [1988] No. 65488).

    Google Scholar 

  6. Ichikawa, F. (Japan. Kokai Tokkyo Koho 61–77330 [1986] from C.A. 105 [1986] No. 125481).

    Google Scholar 

  7. Ito, R.; Shinoda, S. (Japan. Kokai Tokkyo Koho 55–7010 [1980] from C.A. 93 [1980] No. 87057).

    Google Scholar 

  8. Onishi, T. (Japan. Kokai Tokkyo Koho 01–037029 [1987/89] from C.A. 110 [1989] No. 241189).

    Google Scholar 

  9. Nomoto, T.; Yoshida, M. (Japan. Kokai Tokkyo Koho 62–291064 [1987] from C.A. 108 [1988] No. 159888).

    Google Scholar 

  10. Mitsubishi Electric Corp. (Japan. Kokai Tokkyo Koho 59–34639 [1984] from C.A. 101 [1984] No. 47341).

    Google Scholar 

  11. Nippon Electric Co., Ltd. (Japan. Kokai Tokkyo Koho 57–208146 [1981/82] from C.A. 98 [1983] No. 153694).

    Google Scholar 

  12. Jillie, D.; Giridhar, R. V.; Wada, G.; Multani, J. (Proc. Electrochem. Soc. 88–7 [1988] 118/25; C.A. 108 [1988] No. 214696).

    Google Scholar 

  13. Tokuyama, T.; Mori, T.; Kozuka, H.; Miyazaki, T.; Yoshida, I.; Nishimatsu, S. (U.S. 3767483 [1970/73]; C.A. 80 [1974] No. 20720).

    Google Scholar 

  14. Toshiba Corp. (Japan. Kokai Tokkyo Koho 58–93235 [1981/83] from C.A. 99 [1983] No. 185912).

    Google Scholar 

  15. Kato, Y. (Japan. Kokai Tokkyo Koho 60–250636 [1985] from C.A. 104 [1986] No. 217627).

    Google Scholar 

  16. Matsushita Electric Industrial Co., Ltd. (Japan. Kokai Tokkyo Koho 60–27177 [1985] from C.A. 103 [1985] No. 46882).

    Google Scholar 

  17. Mientus, R.; Kriegel, B.; Loeschcke, K. (Ger. [East] 253514 [1988]; C.A. 109 [1988] No. 140842).

    Google Scholar 

  18. Mitsubishi Electric Corp. (Japan. Kokai Tokkyo Koho 60–42835 [1985] from C.A. 103 [1985] No. 97438).

    Google Scholar 

  19. Fukano, S. (Japan. Kokai Tokkyo Koho 61–77336 [1986] from C.A. 105 [1986] No. 106898).

    Google Scholar 

  20. Tonari, S.; Matsumoto, Y. (Japan. Kokai Tokkyo Koho 61–240659 [1986] from C.A. 106 [1987] No. 112254).

    Google Scholar 

  21. Ishii, Y.; Uchibori, K.; Kanno, T.; Nishi, K.; Nakamura, A. (Japan. Kokai Tokkyo Koho 61–144861 [1986] from C.A. 106 [1987] No. 11691).

    Google Scholar 

  22. Waschler, E.; Clauss, H.; Hefner, H. A. (Ger. Offen. 3421127 [1985]; CA. 104 [1986] No. 160624).

    Google Scholar 

  23. Mayumi, S. (Japan. Kokai Tokkyo Koho 60–226128 [1985] from C.A. 104 [1986] No. 160591).

    Google Scholar 

  24. Mayumi, S. (Japan. Kokai Tokkyo Koho 60–161623 [1985] from CA. 104 [1986] No. 80527).

    Google Scholar 

  25. Ogawa, K. (Japan. Kokai Tokkyo Koho 61–96752 [1986] from C.A. 105 [1986] No. 182321).

    Google Scholar 

  26. Komori, K.; Sakai, H.; Kato, H. (Japan. Kokai Tokkyo Koho 62–183185 [1987] from CA. 107 [1987] No. 227445).

    Google Scholar 

  27. Kondo, H. (Japan. Kokai Tokkyo Koho 63–104365 [1988] from C.A. 109 [1988] No. 161901).

    Google Scholar 

  28. Mitsubishi Electric Corp. (Japan. Kokai Tokkyo Koho 58–220458 [1982/83] from C.A. 100 [1984] No. 184335).

    Google Scholar 

  29. Kotani, K. (Japan. Kokai Tokkyo Koho 62–186540 [1987] from C.A. 107 [1987] No. 227500).

    Google Scholar 

  30. Mitlehner, H. (BMFT-FB-T 81–134 [1981] 1/83; CA. 95 [1981] No. 230521).

    Google Scholar 

  31. Kurachi, I. (Japan. Kokai Tokkyo Koho 61–214450 [1986] from C.A. 106 [1987] No. 94559).

    Google Scholar 

  32. Matsushita Electronics Corp. (Japan. Kokai Tokkyo Koho 58–82547 [1981/83] from C.A. 99 [1983] No. 97810).

    Google Scholar 

  33. Schinella, R. D.; Anthony, M. P. (U.S. 3911168 [1973/75]; CA. 83 [1975] No. 201128).

    Google Scholar 

  34. Jinriki, H.; Nishioka, T.; Sakuma, N.; Mukai, K. (Japan. Kokai Tokkyo Koho 62–229965 [1987] from C.A. 108 [1988] No. 141716).

    Google Scholar 

  35. Kusaka, T.; Iijima, S. (Japan. Kokai Tokkyo Koho 62–174922 [1987] from C.A. 108 [1988] No. 14941).

    Google Scholar 

  36. Kusaka, T.; Oji, Y.; Mukai, K. (Japan. Kokai Tokkyo Koho 62–174926 [1987] from CA. 108 [1988] No. 14942).

    Google Scholar 

  37. Kato, H.; Sakai, H.; Yoshimi, T. (Japan. Kokai Tokkyo Koho 62–123725 [1987] from CA. 107 [1987] No. 107623).

    Google Scholar 

  38. Kitajima, H. (Japan. Kokai Tokkyo Koho 60–233829 [1985] from CA. 104 [1986] No. 217010).

    Google Scholar 

  39. Fulton, I. G.; Makris, J. S.; Nastasi, V. R.; Scaduto, A. F.; Shartel, A. C (U.S. 4666556 [1987]; C.A. 107 [1987] No. 88027).

    Google Scholar 

  40. Suwa Seikosha Co., Ltd. (Japan. Kokai Tokkyo Koho 60–85530 [1985] from CA. 103 [1985] No. 133477).

    Google Scholar 

  41. Tamura, M.; Kozuka, K.; Wada, Y.; Okura, O.; Tamura, H.; Tokuyama, T.; Okabe, T.; Minato, O.; Oba, S. (Japan. Kokai Tokkyo Koho 62–90922 [1987] from C.A. 107 [1987] No. 69221).

    Google Scholar 

  42. Suzuki, H.; Umeda, J.; Goto, A.; Nakao, K. (Japan. Kokai Tokkyo Koho 60–150679 [1985] from C.A. 104 [1986] No. 121012).

    Google Scholar 

  43. Fujitsu Ltd. (Japan. Kokai Tokkyo Koho 60–60747 [1985] from C.A. 103 [1985] No. 114539).

    Google Scholar 

  44. Kohl, M. (Eur. Appl. 234384 [1987] from C.A. 109 [1988] No. 46933).

    Google Scholar 

  45. Yoshii, M. (Japan. Kokai Tokkyo Koho 01–035258 [1987/89]; C.A. 111 [1989] No. 207437).

    Google Scholar 

  46. Kato, T.; Watakabe, Y.; Saitoh, K.; Morimoto, H. (Microelectron. Eng. 1 [1983] 69/90; CA. 99 [1983] No. 223182).

    Article  Google Scholar 

  47. Konuma, T. (Japan. Kokai Tokkyo Koho 63–164335 [1988] from C.A. 109 [1988] No. 220956).

    Google Scholar 

  48. Matsumoto, Y. (Japan. Kokai Tokkyo Koho 60–223134 [1985] from C.A. 104 [1986] No. 160543).

    Google Scholar 

  49. Hitachi Ltd. (Japan. Kokai Tokkyo Koho 58–48926 [1981/83] from C.A. 99 [1983] No. 46686).

    Google Scholar 

  50. Ashworth, D. R.; Bolt, A. B. (Brit. 1133333 [1965/68] from C.A. 70 [1969] No. 31397).

    Google Scholar 

  51. Audisio, S. C; Leidheiser, H. (J. Electrochem. Soc. 119 [1972] 408/11).

    Google Scholar 

  52. Mitsubishi Electric Corp. (Japan. Kokai Tokkyo Koho 60–98664 [1985] from C.A. 104 [1986] No. 44423).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Universität Frankfurt/Main, Germany

    Eberhard F. Krimmel

  2. Universität Erlangen, Nürnberg, Germany

    Rudolf Hezel

  3. Gmelin Institute, Frankfurt/Main, Germany

    Uwe Nohl & Rainer Bohrer

Authors
  1. Eberhard F. Krimmel
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Rudolf Hezel
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Uwe Nohl
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Rainer Bohrer
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Gmelin Institute, Frankfurt/Main, Germany

    Alfred Pebler  & Friedrich Schröder  & 

Rights and permissions

Reprints and permissions

Copyright information

© 1991 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Krimmel, E.F., Hezel, R., Nohl, U., Bohrer, R. (1991). Insulating Silicon Nitride Films. In: Pebler, A., Schröder, F. (eds) Si Silicon. Si. Silicium. Silicon (System-Nr. 15), vol S-i / B / 1-5 / 5 / c. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-09901-8_4

Download citation

  • DOI: https://doi.org/10.1007/978-3-662-09901-8_4

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-662-09903-2

  • Online ISBN: 978-3-662-09901-8

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation