Abstract
The arsenal of technologies for silicon micromachining comprise photolithography. thin film deposition. doping, etching by wet chemicals and plasmas and waferbonding. Mainly for the sake of clarity and to describe the notions necessary to understand the limits and possibilities of micromachining we give a brief account of these fabrication methods.
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© 2001 Springer-Verlag Wien
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Elwenspoek, M., Wiegerink, R. (2001). Silicon Micromachining. In: Suleman, A. (eds) Smart Structures. International Centre for Mechanical Sciences, vol 429. Springer, Vienna. https://doi.org/10.1007/978-3-7091-2686-8_19
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DOI: https://doi.org/10.1007/978-3-7091-2686-8_19
Publisher Name: Springer, Vienna
Print ISBN: 978-3-211-83681-1
Online ISBN: 978-3-7091-2686-8
eBook Packages: Springer Book Archive