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Micro-Robot with Integrated Parallel Links

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Theory and Practice of Robots and Manipulators

Part of the book series: International Centre for Mechanical Sciences ((CISM,volume 361))

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Abstract

This paper presents on a micro-robot constructed with integrated parallel links which were made by means of wire electro-discharge machining. The structure of the robot is of rectangular type and the mechanisms of its X and Y axes are constructed by the parallel links of which joints are formed with circular shaped notches. These mechanism are actuated by laminated piezo-actuators. The mechanism and movement of the Z axis are realized by a bimorph piezo-actuator. The damping of this robot body is very small, so that it is controlled by a state feedback controller with the state observer for suppressing the strong resonance. The results obtained experimentally are as follows, (I) dynamic range: 40 μm, (2) bandwidth: about 200 Hz, (3) resolution: submicron order

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Reference

  1. H. Fukasawa: Design of Micro-Robot with Integrated Parallel Links; MS Thesis of Univ. of Tsukuba, 1990 (in Japanese)

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  2. M. Tanaka and K. Nakayama: The Bending Elasticity of a Circular Notched Bar as the Monolithic Flexure Hinges in a Precision Mechanism; Vo1.50, No. 3, Appl. Phys. 1981 (in Japanese)

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  3. K. Furuta et.al.: Mechanical Systems Control; Ohmu Sha, (in Japanese)

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Author information

Authors and Affiliations

  1. Toin University of Yokohama, Yokohama, Japan

    K. Matsushima & K. Nishi

Authors
  1. K. Matsushima
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  2. K. Nishi
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Editor information

Editors and Affiliations

  1. Warsaw University of Technology, Polish

    A. Morecki

  2. Polytechnical University of Milan, Italy

    G. Bianchi

  3. Warsaw University of Technology, Polish

    K. Jaworek

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© 1995 Springer-Verlag Wien

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Matsushima, K., Nishi, K. (1995). Micro-Robot with Integrated Parallel Links. In: Morecki, A., Bianchi, G., Jaworek, K. (eds) Theory and Practice of Robots and Manipulators. International Centre for Mechanical Sciences, vol 361. Springer, Vienna. https://doi.org/10.1007/978-3-7091-2698-1_36

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  • DOI: https://doi.org/10.1007/978-3-7091-2698-1_36

  • Publisher Name: Springer, Vienna

  • Print ISBN: 978-3-211-82697-3

  • Online ISBN: 978-3-7091-2698-1

  • eBook Packages: Springer Book Archive

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