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Synthesis and Micro-Structural Characterization of CrAlN Coatings by Reactive Magnetron Sputtering

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Proceedings of International Conference on Advances in Tribology and Engineering Systems

Part of the book series: Lecture Notes in Mechanical Engineering ((LNME))

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Abstract

The metallic coating such as TiN, CrN and HfN, with the specific lattice structure may possess excellent tribological and chemical properties, which enable their use as wear resistant, corrosion resistant, and diffusion barrier applications. Further improvement in the mechanical and tribological properties, the addition of third element (Al, Si, Ti) in the binary system may possess higher thermal stability, higher hardness and improvement in wear and tear properties. In this context, the CrAlN coatings were syntheses by reactive magnetron sputtering and the influence of addition of Al content on structural and chemical properties were discussed. The microstructure and composition of the as-deposited coatings were systematically characterized by field emission scanning electron microscopy/EDS and atomic force microscopy, and the phase formation by x-ray diffraction (XRD).The coatings were deposited mainly on stainless steel SA304 and the results are analyzed.

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References

  1. Kawate M, Hashimoto AK, Suzuki T (2003) Oxidation resistance of CrAlN and TiAlN films. Surf Coat Technol 165:163–167

    Google Scholar 

  2. Uchida M, Nihira N, Mitsuo A, Toyoda K, Kubota K, Aizawa T (2004) Friction and wear properties of CrAlN and CrVN films deposited by cathodic arc ion plating method. Surf Coat Technol 177–178:627–630

    Google Scholar 

  3. Romero J, Gómez MA, Esteve J, Montalà F, Carreras L, Grifol M, Lousa A (2006) CrAlN coatings deposited by cathodic arc evaporation at different substrate bias. Thin Solid Films 515:113–117

    Google Scholar 

  4. Shah HN, Jayaganthana R, Kaur D (2010) Influence of silicon content on the microstructure and hardness of CrN coatings deposited by reactive magnetron sputtering. Mater Chem Phys 121:567–571

    Google Scholar 

  5. Ding XZ, Zeng XT (2005) Structural, mechanical and tribological properties of CrAlN coatings deposited by reactive unbalanced magnetron sputtering. Surf Coat Technol 200:1372–1376

    Google Scholar 

  6. Barshilia HC, Selvakumar N, Deepthi B, Rajam KS (2006) A comparative study of reactive direct current magnetron sputtered CrAlN and CrN coatings. Surf Coat Technol 201:2193–2201

    Google Scholar 

  7. Pulugurtha SR, Bhat DG (2006) A study of AC reactive magnetron sputtering technique for the deposition of compositionally graded coating in the Cr–Al–N system. Surf Coat Technol 201:4411–4418

    Google Scholar 

  8. Li T, Li M, Zhou Y (2007) Phase segregation and its effect on the adhesion of Cr–Al–N coatings on K38G alloy prepared by magnetron sputtering method. Surf Coat Technol 201:7692–7698

    Google Scholar 

  9. Mayrhofer PH, Music D, Reeswinkel Th, Fuß H-G, Schneider JM (2008) Structure, elastic properties and phase stability of Cr1–xAlxN. Acta Mater 56:2469–2475

    Google Scholar 

  10. Brizuela M, Garcia-Luis A, Braceras I, On˜ate JI, Sa′nchez-Lo′pez JC, Martı′nez-Martı′nez D, Lo′pez-Cartes C, Ferna′ndez A (2005) Corrosion resistance of CrAlN and TiAlN coatings deposited by lateral rotating cathode arc. Surf Coat Technol 200:192–197

    Google Scholar 

  11. Ding XZ, Tan ALK, Zeng XT, Wang C, Yue T, Sun CQ (2008) Corrosion resistance of CrAlN and TiAlN coatings deposited by lateral rotating cathode arc. Thin Solid Films 516:5716–5720

    Google Scholar 

  12. Shah HN, Jayaganthan R (2012) Influence of Al contents on the microstructure, mechanical, and wear properties of magnetron sputtered CrAlN coatings. J Mater Eng Perform 21(9):2002–2009

    Google Scholar 

  13. Sun Y, Wang YH, Seow HP (2004) Effect of substrate material on phase evolution in reactively sputtered Cr-Al-N films. J Mater Sci 39:7369–7371

    Google Scholar 

  14. Chunyan Y, Linhai T, Yinghui W, Shebin W, Tianbao L, Bingshe X (2009) The effect of substrate bias voltages on impact resistance of CrAlN coatings deposited by modified ion beam enhanced magnetron sputtering. Appl Surf Sci 255:4033–4038

    Google Scholar 

  15. Sanche′z JE, Sanche′z OM, Ipaz L, Aperador W, Caicedo JC, Amaya C, Herna′ndez Landaverde MA, Espinoza Beltran F, Mun˜oz-Saldan˜a J, Zambrano G (2010) Mechanical, tribological, and electrochemical behavior of CrAlN coatings deposited by r.f. reactive magnetron co-sputtering method. Appl Surf Sci 256:2380–2387

    Google Scholar 

  16. Makino Y, Nogi K (1998) Synthesis of pseudobinary CrAlN films with B1 structure by rf—assisted magnetron sputtering method. Surf Coat Technol 98:1008–1012

    Google Scholar 

  17. Gautier C, Machet J (1997) Study of the growth mechanisms of chromium nitride films deposited by vacuum ARC evaporation. Thin Solid Films 295:43–52

    Google Scholar 

  18. Pelleg J, Zevin LZ, Lungo S, Croitoru N (1991) Reactive sputter deposited TiN films on glass substrates. Thin Solid Films 197:117–128

    Google Scholar 

  19. Schell N, Petersen JH, Bøttiger J, Mucklich A, Chevallier J, Andr easen KP, Eichhorn F (2003) On the development of texture during growth of magnetron-sputtered CrN. Thin Solid Films 436:100–110

    Google Scholar 

  20. Lugscheider E, Bobzin K, Hornig Th, Maes M (2002) Investigation of the residual stresses and mechanical properties of (Cr,Al)N arc PVD coatings used for semi-solid metal (SSM) forming dies. Thin Solid Films 420–421:318–323

    Google Scholar 

  21. Cunha L, Andritschky M, Pischow K, Wang Z (1999) Microstructure of CrN coatings produced by PVD techniques. Thin Solid Films 355–356:465–471

    Google Scholar 

  22. Lin J, Moore JJ, Mishra B, Pinkas M, Sproul WD, Rees JA (2008) Effect of asynchronous pulsing parameters on the structure and properties of CrAlN films deposited by pulsed closed field unbalanced magnetron sputtering (P-CFUBMS). Surf Coat Technol 202:1418–1436

    Google Scholar 

  23. Cheikh Larbi AB, Tlili B (2006) Fretting wear of multilayered PVD TiAlCN/TiAlN/TiAl on AISI 4140 steel. Surf Coat Technol 201:1511–1518

    Google Scholar 

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Correspondence to Hetal N. Shah .

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Shah, H.N., Jayaganthan, R. (2014). Synthesis and Micro-Structural Characterization of CrAlN Coatings by Reactive Magnetron Sputtering. In: Patel, H., Deheri, G., Patel, H., Mehta, S. (eds) Proceedings of International Conference on Advances in Tribology and Engineering Systems. Lecture Notes in Mechanical Engineering. Springer, New Delhi. https://doi.org/10.1007/978-81-322-1656-8_38

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  • DOI: https://doi.org/10.1007/978-81-322-1656-8_38

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  • Publisher Name: Springer, New Delhi

  • Print ISBN: 978-81-322-1655-1

  • Online ISBN: 978-81-322-1656-8

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