Abstract
The purpose of this work is to design, simulate, and to evaluate the performance of a low power microheater for a gas sensing system. A microheater is a microstructure incorporated in a MOS gas sensor in order to elevate the temperature of the sensor to an operating range for the reliable performance of a gas sensor. An approach is made in this work to find an optimized microheater structure by considering different membrane sizes and geometries and taking into account the temperature distribution and power consumption problems. The materials used for the analysis are Platinum and Polysilicon. After analyzing various microheater designs, a novel design is developed by optimization and varying geometry, layer dimension, and materials of the device. For the developed design, thermal profile and power consumption analysis are carried out. The entire work is carried out in COMSOL MULTIPHYSICS 4.2.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Partridge, J.G., Field, M.R., Sadek, A.Z., Kalantar-Zadeh, K., Du Plessis, J., Taylor, M.B., Atanacio, A., Prince, K.E., McCulloch, D.G.: Fabrication, structural characterization and testing of a nanostructured Tin oxide gas sensor. IEEE Sens. J. 9, 563–568 (2009)
Tao, C., Yin, C., He, M., Tu, S.: Thermal analysis and design of a micro-hotplate for si-substrated micro-structural gas sensor. In: Proceedings of the 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, pp. 284–287, Sanya, China, 6–9 January, 2008
Ruther, P., Ehmann, M., Lindemann, T., Paul, O.: Dependence of the temperature distribution in micro hotplates on heater geometry and heating mode. In: The 12th International Conference on Solid State Sensors, Actuators and Microsystems, pp. 73–76, Boston, 8–12 June, 2003
Chung, G.S., Jeong, J.M.: Fabrication of micro heaters on polycrystalline 3C-SiC suspended membranes for gas sensors and their characteristics. Microelectron. Eng. 87, 2348–2352 (2010)
Mondal, S.S.: Development of MEMS based coplanar microheater structures. Master of Electronics and Tele-Communication Engineering, Thesis submitted by (2013)
Semancik, S., Cavicchi, R.E., Wheeler, M.C., Tiffany, J.E., Poirier, G.E., Walton, R.M., Suehle, J.S., Panchapakesan, B., Devoe, D.L.: Microhotplate platforms for chemical sensor research. vol. 77, pp. 579–591 (2001)
www.comsol.co.in, Introduction to COMSOL Multiphysics. Protected by U.S. Patents 7, 519, 518; 7, 596, 474; 7, 623, 991, pp. 1–162 (2013)
Velmathi, G., Ramshanker, N., Mohan, S.: 2D Simulations and Electrothermal Analysis of Microheater Designs Using COMSOL TM for Gas Sensor Applications. pp. 2–5 (2010)
Sujatha, L., Selvakumar, V.S., Aravind, S., Padamapriya, R., Preethi, B.: Design and analysis of microheaters using COMSOL multiphysics for MEMS based gas sensor. Excerpt from the Proceedings of the 2012 COMSOL Conference in Bangalore
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2015 Springer India
About this chapter
Cite this chapter
Das, K., Kakoty, P. (2015). Design, Simulation, and Performance Evaluation of a High Temperature and Low Power Consumption Microheater Structure for MOS Gas Sensors. In: Bora, P., Prasanna, S., Sarma, K., Saikia, N. (eds) Advances in Communication and Computing. Lecture Notes in Electrical Engineering, vol 347. Springer, New Delhi. https://doi.org/10.1007/978-81-322-2464-8_19
Download citation
DOI: https://doi.org/10.1007/978-81-322-2464-8_19
Published:
Publisher Name: Springer, New Delhi
Print ISBN: 978-81-322-2463-1
Online ISBN: 978-81-322-2464-8
eBook Packages: EngineeringEngineering (R0)