Skip to main content

Determining the Nanoscale Friction and Wear Behavior of Si, SiC and Diamond by Microscale Environmental Tribometry

  • Chapter
Fundamentals of Tribology and Bridging the Gap Between the Macro- and Micro/Nanoscales

Part of the book series: NATO Science Series ((NAII,volume 10))

Abstract

This paper offers a review of the author’s decade-long attempts to examine the tribochemical changes that occur with various crystallinities of (a) polished silicon (b) unpolished and polished polycrystalline diamond films, and (c) a commercially available version of polished polycrystalline α-SiC. Theory-based model experiments were performed in ∼1.33 × 10 Pa = 1 × 10-5 Torr vacuum (∼93% of the residual gases is water vapor) and some in low partial pressures of hydrogen test atmospheres, at temperatures ranging from lab-ambient to 950°C. The apparatus used was a unique pin-on-oscillating-flat-type scanning electron microscope (SEM) tribometer specially built to fill the gap between an atomic force microscope and a conventional, bench-top friction and wear tester. Its primary purpose has been to examine the changes in the tribological behavior of a variety of bearing materials and solid lubricants, under realistic engineering (Hertzian) contact stresses in the GPa to MPa (from many thousands to hundreds of psi) range, as influenced by elevated temperatures in moderate vacuum and in low partial pressures of inert or reactive gases. The coefficient of friction and wear measurements were occasionally complemented by surface analyses to decipher the footprints of atomic-level surface interactions by the tribological behavior of essentially microscopic (∼50 to 500 μm diameter) Hertzian contacts. All the friction trends indicate that the changes in adhesion (and thus the coefficient of adhesive friction) can be explained by the number of dangling (high-friction), reconstructed (reduced-friction) or adsorbate-passivated (low-friction) surface bonds developing on the counterfaces as a function of temperature and atmospheric environment.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 259.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 329.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 329.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  • Achtzinger, N., Grillenberger, J., Whitthuhn, W., Linnarsson, M.K., Janson, M. and Svensson, B.G. (1998), “Hydrogen Passivation of Silicon Carbide by Low-energy Ion Implantation,” Appl. Phys. Lett., 73, 945–947.

    Article  Google Scholar 

  • Didziulis, S.V. Lince, J.R., Fleischauer, P.D. and Yarmoff J.A. (1991), “Photoelectron Spectroscopic Studies of the Electronic Structure of α-SiC,” Inorg. Chem., 30, 672–678.

    Article  CAS  Google Scholar 

  • Erdemir, A. and Fenske, G.R. (1996), “Tribological Performance of Diamond and Diamondlike Carbon Films at Elevated Temperatures, Tribol Trans., 39, 787–794.

    Article  CAS  Google Scholar 

  • Gardos, M.N. (1994), “Tribology and Wear Behavior of Diamond,” Chapter 12 in Synthetic Diamond: Emerging CVD Science and Technology, (K.E. Spear, and J.P. Dismukes, eds.), Electrochem. Soc. Monograph, John Wiley and Sons, New York, NY, 533–580.

    Google Scholar 

  • Gardos, M.N. (1996), “Surface Chemistry-Controlled Tribological Behavior of Si and Diamond,” Tribol. Lett., 2, 173–187.

    Article  CAS  Google Scholar 

  • Gardos, M.N. (1996a), “Tribological Behavior of Polycrystalline and Single-Crystal Silicon,” Tribol. Lett., 2, 355–373.

    Article  CAS  Google Scholar 

  • Gardos, M.N. (1998), “Advantages and Limitations of Silicon as a Bearing Material for MEMS Applications,” in Tribology Issues and Opportunities in MEMS, (B. Bhushan, ed.) Kluwer Academic Publishers, 341–365.

    Google Scholar 

  • Gardos, M.N. (1998a), “Re(de)construction-induced Friction Signatures of Polished Polycrystalline Diamond Films in Vacuum and Hydrogen,” Tribol. Lett., 4, 175–188.

    Article  CAS  Google Scholar 

  • Gardos, M.N. (1999), “Tribological Fundamentals of Polycrystalline Diamond Films,” Surf, Coat. Technol. 113,183–200.

    Article  CAS  Google Scholar 

  • Gardos, M.N. (2000), “Tribo-oxidative Degradation of Polished Polycrystalline Diamond Films in 0.2 Torr Partial Pressure of Oxygen,” paper presented at the 26th Leeds-Lyon Symposium on Tribology, 14-17 Sept. 1999, U. of Leeds, UK, (in press).

    Google Scholar 

  • Gardos, M.N. and Ravi, K.V. (1989), “Tribological Behavior of CVD Diamond Films,” Electrochem. Soc. Proc. Vol. 89–12, 475–493.

    Google Scholar 

  • Gardos, M.N. and Soriano, B.L. (1990), “The Effect of Environment on the Tribological Properties of Polycrystalline Diamond Films,” J. Mater. Res., 5, 2599–2609.

    Article  Google Scholar 

  • Gardos, M.N. and Ravi, K.V. (1994), “Surface-Chemistry-Controlled Friction and Wear Behavior of Si(100) vs. Textured Polycrystalline Diamond Film Tribocontacts,” Dia. Films & Technol., 4, 139–165.

    CAS  Google Scholar 

  • Gardos, M.N. and Ravi, K.V. (1995), “Carbon-Graphite-Like Friction Behavior of Polycrystalline Diamond Sliding Against Itself in Vacuum,” The Electrochem. Soc. Proc. Vol. 95-4, 415–424.

    CAS  Google Scholar 

  • Gardos, M.N., Adams, P.M., Barrie, J.D. and Hilton, M.R. (1997), “Crystal-Structure-Controlled Tribological Behavior of Carbon-Graphite Seal Materials in Partial Pressures of Helium and Hydrogen. I. Specimen Characterization and Fundamental Considerations,” Tribol. Lett., 3, 175–184.

    Article  CAS  Google Scholar 

  • Gardos, M.N., Davis, P.S. and Meldrum, G.R. (1997a), “Crystal-Structure-Controlled Tribological Behavior of Carbon-Graphite Seal Materials in Partial Pressures of Helium and Hydrogen. II. SEM Tribometry,” Tribol. Lett., 3, 185–198.

    Article  CAS  Google Scholar 

  • Gardos, M.N. and Gabelich, S.A. (1999), “Atmospheric Effects of Friction, Friction Noise and Wear with Silicon and Diamond. Part I. Test Methodology,” Tribol. Lett., 6, 79–86.

    Article  CAS  Google Scholar 

  • Gardos, M.N. and Gabelich, S.A. (1999a), “Atmospheric Effects of Friction, Friction Noise and Wear with Silicon and Diamond. Part II. SEM Tribometry of Silicon in Vacuum and Hydrogen,” Tribol. Lett., 6, 87–102.

    Article  CAS  Google Scholar 

  • Gardos, M.N. and Gabelich, S.A. (1999b), “Atmospheric Effects of Friction, Friction Noise and Wear with Silicon and Diamond. Part III. SEM Tribometry of Polycrystalline Diamond in Vacuum and Hydrogen,” Tribol. Lett., 6, 103–112.

    Article  CAS  Google Scholar 

  • Hilton, M.R. (1993), “Tribological Approaches to Micromachine Design and Fabrication for Space Applications,” in Micro-and Nanotechnology for Space Systems: An Initial Evaluation, (eds. H. Helvejian and E.Y. Robinson), Aerospace Report No. ATR-93(8349)-l, The Aerospace Corp., El Segundo, CA, 127–135.

    Google Scholar 

  • Homma, Y., Suzuki, M., and Tomita, M. (1993), “Atomic Configuration Dependent Secondary Electron Emission from Reconstructed Silicon Surfaces,” Appl. Phys. Lett., 62, pp. 3276–3278.

    Article  CAS  Google Scholar 

  • Lee, D.H. and Joannopoulos, J.D. (1982), “Ideal and Relaxed Surfaces of SiC,” J. Vac. Sci. Technol., 21, 351–357.

    Article  CAS  Google Scholar 

  • Muelhoff, L., Choyke, W.J., Bozack, M.J. and Yates, J.T. Jr., (1986), “Comparative Electron Spectroscopic Studies of Surface Segregation on SiC(000l) and SiC(000l),” J. Appl. Phys., 60, 2842–2853.

    Article  Google Scholar 

  • Radhakhrishnan, G., Adams, P.M., Robertson, R. and Cole, R. (2000), “Integration of Wear-Resistant Titanium Carbide Coatings into MEMS Fabrication Processes,” Tribol. Lett, and references therein (in press).

    Google Scholar 

  • Rahaman, M.N., Boiteux, Y. and De Jonghe, L.C. (1986), “Surface Characterization of Silicon Nitride and Silicon Carbide Powders,” Am. Ceram. Soc. Bull., 65, 1171–1176.

    CAS  Google Scholar 

  • Rajan, N., Mehregany, M., Zorman, C.A. and Stefanescu, S. (1999), “Fabrication and Testing of Micromachined Silicon Carbibe and Nickel Fuel Atomizers for Gas Turbine Engines,” J. MEMS, 8, 251–257.

    Article  CAS  Google Scholar 

  • Shin, W., Hikosaka, T., Seo, W.-S., Ahn H.S., Sawaki, N. and Koumoto, K. (1998), “Fibrous and Porous Microstructure Formation in 6H-SiC by Anodization in HF Solution,” J. Electrochem. Soc, 145, 2456–2460.

    Article  CAS  Google Scholar 

  • Singh, N.N. and Rys, A. (1998), “Electrical Characterization of 6H-SiC Metal Oxide Semi-conductor Structures at High Temperature,” J. Electrochem. Soc, 145, 299–302.

    Article  CAS  Google Scholar 

  • Tkachenko, Yu. G., Pilyankevich, A.N., Britun, V.F., Bazilevich, V.D., Opanashchuk, N.F., Dyban’, Yu.P., Yurchenko, D.Z. and Yulyugin, V.K. (1979), “Frictional Characteristics and Contact-Zone Deformation Behavior of TiC in its Homogeneity Range,” Soviet Powder Metallurgy and Metal Ceramics, 18(6), 45–51.

    Article  Google Scholar 

  • Ueno, K., Asai, R. and Tsui, T. (1998), “4H-SiC MOSFET’s Utilizing the H2 Surface Cleaning Technique,” IEEE Electr. Dev. Lett., 19(7), 244–246.

    Article  CAS  Google Scholar 

  • Vathulya, V.R., Wang, D.N. and White, M.H. (1998), “On the Correlation between the Carbon Content and the Electrical Quality of Thermally Grown Oxides on p-type 6H-SiC,” Appl. Phys. Lett., 73, 2161–2163.

    Article  CAS  Google Scholar 

  • Yasseen, A.A., Zorman, C.A. and Mehregany, M. (1999), “Surface Micromachining of Polycrystalline SiC Films using Microfabricated Molds of SiO2 and Polysilicon,” J. MEMS, 8,237–242.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2001 Springer Science+Business Media Dordrecht

About this chapter

Cite this chapter

Gardos, M.N. (2001). Determining the Nanoscale Friction and Wear Behavior of Si, SiC and Diamond by Microscale Environmental Tribometry. In: Bhushan, B. (eds) Fundamentals of Tribology and Bridging the Gap Between the Macro- and Micro/Nanoscales. NATO Science Series, vol 10. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0736-8_36

Download citation

  • DOI: https://doi.org/10.1007/978-94-010-0736-8_36

  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-0-7923-6837-3

  • Online ISBN: 978-94-010-0736-8

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics