Abstract
Load cells are force sensors that are used in weighing equipment. Most current load cells for large loads, i.e. larger than 1000 kg, contain a spring element made of steel. This spring element deforms under a load, which is measured by a sensor element as indicated in Fig. 1. Usually, the sensor element consists of a number of resistive strain gauges that are glued on the spring element. Hysteresis and creep limit the performance of these load cells even when expensive high-grade steels are used. For monocrystalline silicon hysteresis and creep are extremely low [1]; therefore, silicon is an ideal material for use in load cells.
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References
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© 2001 Springer Science+Business Media Dordrecht
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Wiegerink, R.J., Zwijze, R.A.F., Krijnen, G.J.M., Elwenspoek, M.C. (2001). High Capacity Silicon Load Cells. In: Elwenspoek, M. (eds) Sensor Technology 2001. Springer, Dordrecht. https://doi.org/10.1007/978-94-010-0840-2_13
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DOI: https://doi.org/10.1007/978-94-010-0840-2_13
Publisher Name: Springer, Dordrecht
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