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Microstructure and Mechanical Properties of Multilayered α-AlN/α-BCN Coatings Depending on Flux Density During Target B4C Sputtering

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Advances in Thin Films, Nanostructured Materials, and Coatings

Part of the book series: Lecture Notes in Mechanical Engineering ((LNME))

Abstract

Multilayered AlN/BCN coatings with nanoscale layers were fabricated by magnetron sputtering of Al and B4C targets on Si substrate. Deposited amorphous AlN/BCN coatings have demonstrated increased nano- and Knoop hardnesses, Young’s modulus in compare with AlN and BCN coatings, which explained by strain modulation in amorphous layers of AlN and BCN. The application of flux density IB4C (100 mA) has led to significant increasing of hardness from 18 to 27 GPa due to the formation of α-BCN phase according to Fourier spectra. Nanolayered coatings have been thermally stable up to 600 °C due to the slow diffusion processes in amorphous sublayer, which indicates higher oxidation resistance then nanocrystalline.

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Acknowledgements

This work was done under the aegis of Ukrainian state budget program «Physical basis of forming of composition and properties of nanostructured boride, nitride and boron-nitride films of refractory metals for their usage in machine building» (No 0116U002621). Authors are grateful to Prof. O. D. Pogrebnyak and A.A. Bagdasaryan for discussing the results of the research.

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Authors and Affiliations

  1. Frantsevich Institute for Materials Science Problems, National Academy of Sciences of Ukraine, Kiev, Ukraine

    V. I. Ivashchenko

  2. Sumy State University, Sumy, Ukraine

    V. M. Rogoz

  3. Lublin University of Technology, Lublin, Poland

    T. N. Koltunowicz

  4. Abai Kazakh National Pedagogical University, Almaty, Kazakhstan

    A. I. Kupchishin

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  1. V. I. Ivashchenko
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  2. V. M. Rogoz
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  3. T. N. Koltunowicz
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  4. A. I. Kupchishin
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Correspondence to V. M. Rogoz .

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Editors and Affiliations

  1. Department of Nanoelectronics, Sumy State University, Sumy, Ukraine

    Alexander D. Pogrebnjak

  2. Materials Science Division, Argonne National Laboratory, Lemont, IL, USA

    Valentine Novosad

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Ivashchenko, V.I., Rogoz, V.M., Koltunowicz, T.N., Kupchishin, A.I. (2019). Microstructure and Mechanical Properties of Multilayered α-AlN/α-BCN Coatings Depending on Flux Density During Target B4C Sputtering. In: Pogrebnjak, A.D., Novosad, V. (eds) Advances in Thin Films, Nanostructured Materials, and Coatings. Lecture Notes in Mechanical Engineering. Springer, Singapore. https://doi.org/10.1007/978-981-13-6133-3_5

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