Abstract
In this paper exergy analysis is applied on Atomic Layer Deposition (ALD) of Al2O3 thin film to analyze the utilization and losses of exergy in ALD system. The exergies associated with material flow, heat flow, and work flow are calculated. Based on the exergy balance equation, exergy loss is calculated for the ALD Al2O3 process and then exergy efficiency is calculated with a value of 2.72×10− 5 . According to the result it can be concluded that the utilization of exergy is extremely low in ALD Al2O3 process. This research can be useful for future energy consumption and optimization of ALD system.
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© 2013 Springer Science + Business Media Singapore
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Wang, F., Li, T., Zhang, HC., Yuan, C.Y. (2013). Exergy Analysis of Atomic Layer Deposition for Al2O3 Nano-film Preparation. In: Nee, A., Song, B., Ong, SK. (eds) Re-engineering Manufacturing for Sustainability. Springer, Singapore. https://doi.org/10.1007/978-981-4451-48-2_47
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DOI: https://doi.org/10.1007/978-981-4451-48-2_47
Publisher Name: Springer, Singapore
Print ISBN: 978-981-4451-47-5
Online ISBN: 978-981-4451-48-2
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