Abstract
The gas-dynamic effects which are so prominent in laser-pulse sputtering have three limiting cases. The one limit could be described as an unsteady adiabatic expansion (UAE) due to gas which escapes from a finite reservoir (“outflow” model). The second limit is that the particles are released from target surface, form a Knudsen layer (KI,), and then enter a UAE (“KL-UAE” model). Closely related is the third limiting case, which allows for condensation at the surface (“condensation” model). Explicit photographs suggest that either the KI: UAE or the condensation model is relevant to laser-pulse sputtering of the polymer polymethylmcthacrylate (PMMA).
References
R. Srinivasan, B. Braren, and K.G. Casey, J. Appl. Phys. 68, 1842 (1990).
B. Braren, K.G. Casey, and R. Kelly, Appl. Phys. B (submitted).
R. Kelly, Nucl. Instr. Meth. B46, 441 (1990) and J. Chem. Phys. 92, 5047 (1990).
R. Kelly, Phys. Rev. (submitted).
T. Bergstrøm and T. Ytrchus, Phys. Fluids 27, 583 (1984).
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© 1991 Springer-Verlag
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Kelly, R., Braren, B., Casey, K.G. (1991). Mechanistic insight in the laser-pulse sputtering of polymers by combined photographiy and gas-dynamic analysis. In: Miller, J.C., Haglund, R.F. (eds) Laser Ablation Mechanisms and Applications. Lecture Notes in Physics, vol 389. Springer, New York, NY. https://doi.org/10.1007/BFb0048362
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DOI: https://doi.org/10.1007/BFb0048362
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