Abstract
The surface oxidation of semiconductors stimulated by laser irradiation will be presented considering both laser induced deposition of oxide films and laser induced oxidation of an irradiated substrate. Some emphasis will be given to oxidation processes occurring in surface melted layers produced by intense laser pulses. In particular, possible mechanisms of ultrafast oxide growth will be presented summarizing both what is understood in transient laser processing and the still unresolved questions.
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© 1985 Friedr. Vieweg & Sohn Verlagsgesellschaft mbH
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Bentini, G.G. (1985). Surface oxidation induced by laser irradiation in semiconductors. In: Grosse, P. (eds) Festkörperprobleme 25. Advances in Solid State Physics, vol 25. Springer, Berlin, Heidelberg. https://doi.org/10.1007/BFb0108138
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DOI: https://doi.org/10.1007/BFb0108138
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